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Simulation of Gas-Phase Kinetics in CHF3:H2: O2 Mixtures

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6 Author(s)

A gas-phase reaction model for and mixtures was developed. Self-consistent electron impact cross-section set for was introduced. The original total and partial dissociation cross sections were received. A developed gas-phase kinetic scheme was tested on the experimental data. An important role of the chain reactions in the kinetics of F and H atoms and radicals was revealed.

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Plasma Science, IEEE Transactions on  (Volume:35 ,  Issue: 6 )