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Vehicles, helicopters or humanoid robots are multi-input and multi-output, which have 3 DOF (degrees of freedom) in translational and rotational directions, respectively. So, accurate measurement of all 6 DOF motion is essential to their control. The purpose of our work is to develop a stable and highly accurate motion sensor. In the newly developed system, 6 DOF motion can be resolved by using 6 linear accelerometers. This paper describes the stability and alignment error analysis of our system. Finally, we investigate the availability of our sensor system by experiments. The results show that it has good performance for relatively complex motions.