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MicroBolometer on Polymer Membrane with Heat Feedback Control for Non Radiative Applications

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7 Author(s)
M. Denoual ; GREYC-electronique, ENSICAEN, Caen, France ; S. Delaunay ; F. Durantel ; B. Guillet
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This paper presents a microbolometer on a polymer membrane using heat feedback control. The target application of this device is basically infrared (IR) measurement in a wide wavelength range but can be extended to various purposes in particular chemical detection applications. A special attention was paid on characterisation and signal/noise ratio (SNR) study to optimize the performances. The interest of this work stands in the usage of thermal feedback with a microbolometer easily realized on a polymer membrane without any coolant and the proposed applications in chemical detection at room temperature.

Published in:

Sensors, 2007 IEEE

Date of Conference:

28-31 Oct. 2007