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Silicon micro- and nanostructures formed by femtosecond laser pulses

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10 Author(s)

This paper investigates the silicon surfaces structured by femtosecond laser pulses by the scanning electron microscopy (SEM), atomic-force microscopy (AFM), third-harmonic (TH) generation, photoluminescence (PL), and Raman spectroscopy techniques.

Published in:

Lasers and Electro-Optics, 2007 and the International Quantum Electronics Conference. CLEOE-IQEC 2007. European Conference on

Date of Conference:

17-22 June 2007

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