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3-D Micro Coaxial Transmission Lines With Integrated MEM Capacitors

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3 Author(s)

This paper introduces a 20 mum-tall, rectangular micro coaxial transmission line with an embedded micro electromechanical (MEM) capacitor. The measured capacitance ratio is about 6.5 with an actuation voltage of 30-50 V. To the best of the authors' knowledge, this is the first time a MEM device has been implemented within a fully-shielded, micro coaxial transmission line structure. The fabrication includes a single step release process for a dual layer suspended structure (beam and the top lid).

Published in:

IEEE Microwave and Wireless Components Letters  (Volume:17 ,  Issue: 12 )