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Optimizing Pulsed OBIC Technique for ESD Defect Localization

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8 Author(s)

This paper presents a study of the well-known optical beam-induced current (OBIC) technique applied to electrostatic-discharge defect localization. The OBIC technique is improved by using a pulsed laser beam instead of a continuous one. Critical parameters of the experimentation are explored in this paper. We particularly discuss on the influence of the laser energy, the bias of the device under test and the spatial resolution of the technique.

Published in:

IEEE Transactions on Device and Materials Reliability  (Volume:7 ,  Issue: 4 )