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Millisecond processing beyond chip technology: From electronics to photonics

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17 Author(s)
Skorupa, W. ; Inst. of Ion Beam Phys. & Mater. Res., Dresden ; Anwand, W. ; Posselt, M. ; Prucnal, S.
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There is a clear and increasing interest in short time annealing processing far below one second, i.e. the lower limit of Rapid Thermal Processing (RTP) called spike annealing. This was driven by the need of suppressing the so-called Transient Enhanced Diffusion in advanced boron-implanted shallow pn-junctions in silicon technology. Meanwhile the interest in flash lamp annealing (FLA) in the millisecond range spread out into other fields related to silicon technology and beyond. This paper reports on recent experiments regarding shallow junction engineering in germanium, annealing of ITO layers on glass and plastic foil to form an conductive layer as well as investigations which we did during the last years in the field of wide band gap semiconductor materials (SiC, ZnO). A more common feature evolving from our work was related to the modeling of wafer stress during millisecond thermal processing with flash lamps. Finally recent achievements in the field of silicon-based light emission basing on Metal-Oxide-Semiconductor Light Emitting Devices will be reported.

Published in:

Advanced Thermal Processing of Semiconductors, 2007. RTP 2007. 15th International Conference on

Date of Conference:

2-5 Oct. 2007