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Design and Fabrication of Monolithic Distributed Traveling-Wave Photodetectors Integrated With Polymer Optical Waveguides

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6 Author(s)

We have designed and fabricated monolithic distributed balanced traveling-wave metal-semiconductor-metal photodetectors (MSM PDs) distributed along single-mode polymer optical waveguides. We demonstrate that monolithically integrated polymer optical waveguides on a semiconductor can provide efficient optical interconnects in an optoelectronic circuit. A responsivity of 0.44 A/W and a 3-dB bandwidth of 10 GHz were obtained in a PD array with five MSM PDs. A high photocurrent of 7.3 mA was measured in an array having eight MSM PDs. Impulse response measurements were performed and the results were compared with frequency domain results.

Published in:

Electron Devices, IEEE Transactions on  (Volume:54 ,  Issue: 12 )

Date of Publication:

Dec. 2007

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