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On-chip Integration of Microfluidic Channels with Ultra-high Q Silicon Microdisk Resonators for Lab-on-a-Chip Sensing Applications

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6 Author(s)
Yegnanarayanan, S. ; Georgia Inst. of Technol., Atlanta ; Roman, W. ; Soltani, M. ; Cremona, G.
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This study demonstrates the design, fabrication, and characterization of a sensing platform based on the on-chip integration of such silicon-based microdisk resonators (with ultra high Q > 106) with microfluidic channels for sample delivery. Tuning of the resonance features using fluid in upper-cladding as well as applications in lab-on-a-chip sensing are reported.

Published in:

Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE

Date of Conference:

21-25 Oct. 2007

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