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Development of a Precision Parallel Micro-mechanism for Nano Tele-operation

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2 Author(s)
Jian Wang ; Kagawa Univ., Kagawa ; Shuxiang Guo

There is an urgent demand for nano level tele-operating system to carry out three-dimensional high-speed micro manipulations for medical and biotechnological applications. In this paper, we designed a precision parallel micro-mechanism driven by piezo actuators (PZT) as the operating robot with 6 DOF, a movement range of 20 mum, and a resolution of less than 20 nm. Also, we presented the conceptual design, synthesis, control strategy, and evaluation for the precision parallel micro-mechanism. The experimental results indicate that the developed parallel micro-mechanism can be used to manipulate micro-objects at high speed and with high precision.

Published in:

Complex Medical Engineering, 2007. CME 2007. IEEE/ICME International Conference on

Date of Conference:

23-27 May 2007