Cart (Loading....) | Create Account
Close category search window
 

Lossless Compression Algorithms for Post-OPC IC Layout

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Gu, A. ; California Univ. at Berkeley, Berkeley ; Zakhor, A.

An important step in today's integrated circuit (IC) manufacturing is optical proximity correction (OPC). While OPC increases the fidelity of pattern transfer to the wafer, it also results in significant increase in IC layout file size. In this paper, we develop two techniques for compressing post-OPC layout data while remaining compliant with existing industry standard data formats such as OASIS and GDSII. The motivation for doing so is for the resulting compressed files to be viewed and edited by any industry standard CAD tools without a decoder. Our approach is to eliminate redundancies in the representation of the geometric data by finding repeating groups of polygons between multiple cells as well as within a cell. We refer to the former as "inter-cell sub-cell detection" and the later as "intra-cell sub-cell detection". Both problems are NP hard, and as such, we propose two sets of greedy algorithms to solve them. We show the results of our proposed inter-cell and intra-cell algorithms on actual 90nm, 130nm, and 180nm IC layouts.

Published in:

Image Processing, 2007. ICIP 2007. IEEE International Conference on  (Volume:2 )

Date of Conference:

Sept. 16 2007-Oct. 19 2007

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.