Referenced Items are not available for this document.
This paper deals with the static and dynamic characterisation of novel piezo resistive diamond like carbon layers which can be fabricated with high hardness and wear resistance. The advantage of these films, deposited in a plasma enhanced chemical vapor deposition process (PECVD), is the possibility to integrate them in a stiff environment for the detection of load. This is due to the fact, that they do not need any deformation like stain gauges. This property makes them interesting for adaptronic applications.
Published in:
Industrial Electronics, 2007. ISIE 2007. IEEE International Symposium on
Date of Conference: 4-7 June 2007
- Page(s):
- 1482 - 1484
- E-ISBN :
- 978-1-4244-0755-2
- Print ISBN:
- 978-1-4244-0754-5
- INSPEC Accession Number:
- 9706946
- Conference Location :
- Vigo
- Digital Object Identifier :
- 10.1109/ISIE.2007.4374821
- Product Type:
- Conference Publications
About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies
A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2013 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.
