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Full-Gap Positioning of Parallel-Plate Electrostatic MEMS Using On-off Control

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4 Author(s)
Mol, L. ; Delft Univ. of Technol., Delft ; Cretu, E. ; Rocha, L.A. ; Wolffenbuttel, R.F.

Electrostatic parallel-plate actuators are classically limited to displacements up to 1/3 of the gap due to the pull-in effect [1],[2|. A closed-loop feedback based method presented in [3] is recently introduced to overcome this limitation. Optimized structures are designed to minimize residual position ripple while maintaining bandwidth, effectively reducing the required device size of positioning electrostatic actuators by a factor three.

Published in:

Industrial Electronics, 2007. ISIE 2007. IEEE International Symposium on

Date of Conference:

4-7 June 2007

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