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High-Voltage Amplifier Design for MEMS based Switching Arrays in Wavelength-Division Multiplexing Networks

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8 Author(s)
Steffen Heinz ; Faculty Electrical Engineering and Information Technology, Chemnitz University of Technology, Chemnitz, Germany. Email: steffen.heinz@etit.tu-chemnitz.de ; Andre Lange ; Klaus Erler ; Gunter Ebest
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The paper describes the design requirements of integrated high-voltage amplifiers for large MEMS based arrays which consist of electrostatically driven actuators. Such actuators are applied in optical switching arrays for cross connects in wavelength-division multiplexing (WDM) networks. Besides a new calculation approach for the efficiency of amplifier operation modes a new concept of level-shifter circuitry for switching output stages of high-voltage amplifiers is presented and compared with conventionally level-shifter circuits.

Published in:

2007 IEEE International Symposium on Industrial Electronics

Date of Conference:

4-7 June 2007