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An optical MEMS pressure sensor based on phase demodulation

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5 Author(s)
Yixian Ge ; Nanjing Normal Univ., Nanjing ; Ming Wang ; Xuxing Chen ; Haitao Yan
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A novel optical fiber pressure sensor based on Fabry-Perot (FP) interferometer and phase demodulation method is described. MEMS techniques and the common communicational components are used to fabricate the sensor. The principles of pressure measurement and sensor design have been introduced. Phase demodulation method based on Fourier transformation is explored, which can reduce errors resulting from intensity variation of light source. Experimental results demonstrate that the sensor has reasonable linearity, sensitivity and a wide pressure measurement range from 0.1MPa to 3MPa.

Published in:

Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on

Date of Conference:

Aug. 12 2007-July 16 2007