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Laser Doppler Vibrometer Using a 45°-angled Optical Fiber for In-plane Dynamic Measurement of MEMS Actuators

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5 Author(s)
Man Geun Kim ; Dept. of Information and Mechatronics, Gwangju Institute of Science and Technology (GIST), 1 Oryong-dong, Buk-gu, Gwangju 500-712, Republic of Korea ; Kyoungwoo Jo ; Youngsik Park ; Wongun Jang
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A FOLDV (fiber optic laser doppler vibrometer) using a 45deg-angled optical fiber with a self-aligned micro lens can be used to measure the in-plane dynamic motion of microstructure that does not allow optical access in sidewall direction. This system features a good immunity to external disturbance and easy alignment of optical components during system assembly. The performance of the proposed fiber-based vibrometer is evaluated in terms of signal stability, and compared with other type of LDV.

Published in:

2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics

Date of Conference:

Aug. 12 2007-July 16 2007