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Optical NEMS Based Force Sensor Using Silicon Nanophotonics

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5 Author(s)
Chengkuo Lee ; Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117576, Republic of Singapore; Institute of Microelectronics, A, Singapore 117685, Republic of Singapore; Star, Singapore 117685, Republic of Singapore, E-mail; ; Rohit Radhakrishnan ; Chii-Chang Chen ; Jing Li
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A line defect in a silicon two-dimensional (2-D) photonic crystal (PhC) is created as a waveguide for light propagation via the PhC. By introducing micro-cavities within the line defect so as to form the resonant band gap structure for PhC, we demonstrate a PhC waveguide (PhCWG) filter with clear resonant peak in output wavelength spectrum. We conceptualized a novel nanomechanical beam structure embedded with this PhCWG filter, i.e., a NEMS (Nanoelectromechanical system) based force sensor. Since the output resonant wavelength is sensitive to the shape of air holes and defect length of the micro-cavity. Shift of the output resonant wavelength is correlated with beam deformation or force loading for this free-standing PhCWG beam. Simply speaking, the induced strain modifies the shape of air holes and the spacing among them for micro-cavities along the silicon waveguide of PhCWG For a silicon PhCWG beam structure with dimension of 340 nm(thickness) x 5 mum(width) x 20 mum(length), the measurable vertical deformation of 20-25 nm at the center and detectable strain of defect length of 0.004% is derived according to simulation results.

Published in:

2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics

Date of Conference:

Aug. 12 2007-July 16 2007