Cart (Loading....) | Create Account
Close category search window
 

Micro Knife-edge Optical Measurement Devices Fabricated by SOI and CMOS MEMS Processes

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Tzu-Lin Chang ; Nat. Chiao Tung Univ., Hsinchu ; Tseng, V.F.-G. ; Yi Chiu

The knife-edge method is a commonly used technique to characterize the optical profiles of laser beams or focused optical spots. In this paper, we present the design, fabrication, and test of a micro knife-edge scanner based on the micro-electromechanical-system (MEMS) technology. Silicon-on-insulator (SOI) processes are used to demonstrate the feasibility of the new device, whereas the CMOS-MEMS processes are used to enable the integration of the photo detector and on-chip signal conditioning circuitry. Focused optical spot size measured by the reflection-type SOI device is demonstrated to be close to the diffraction limit. Preliminary measurement results of the CMOS-MEMS device are also presented.

Published in:

Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on

Date of Conference:

Aug. 12 2007-July 16 2007

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.