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Micro Knife-edge Optical Measurement Devices Fabricated by SOI and CMOS MEMS Processes

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3 Author(s)
Tzu-Lin Chang ; Nat. Chiao Tung Univ., Hsinchu ; Tseng, V.F.-G. ; Yi Chiu

The knife-edge method is a commonly used technique to characterize the optical profiles of laser beams or focused optical spots. In this paper, we present the design, fabrication, and test of a micro knife-edge scanner based on the micro-electromechanical-system (MEMS) technology. Silicon-on-insulator (SOI) processes are used to demonstrate the feasibility of the new device, whereas the CMOS-MEMS processes are used to enable the integration of the photo detector and on-chip signal conditioning circuitry. Focused optical spot size measured by the reflection-type SOI device is demonstrated to be close to the diffraction limit. Preliminary measurement results of the CMOS-MEMS device are also presented.

Published in:

Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on

Date of Conference:

Aug. 12 2007-July 16 2007