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This paper describes the fabrication of Si micro probe and SiO2 micro tube array and their mechanical properties. The device is successfully fabricated with high-density array. One of the requirements of the penetrating device is to have the enough mechanical strength to be able to penetrate into the tissue. Hence mechanical properties are investigated and discussed using the results on bending obtained by experiments and simulation of finite element method. The device was penetrated by simple in-vitro experiments using a gelatin.