CMOS-Based Capacitive Sensor Array Dedicated to Microfluidic Studies

We present a novel technique to study the behavior of liquids in microfluidics. For this, an array of capacitive sensor realized in CMOS circuitry is considered to detect the liquid in a channel integrated into CMOS chip. We describe a robotic-based microfluidic fabrication process and the preliminary experimental results. Also, the capacitive simulation results are displayed using a finite-element based software.