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CMOS-Based Capacitive Sensor Array Dedicated to Microfluidic Studies

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4 Author(s)
Zadeh, E.G. ; Ecole Polytech. de Montreal, Montreal ; Sawan, M. ; Jalali, M. ; Therriault, D.

We present a novel technique to study the behavior of liquids in microfluidics. An array of capacitive sensors realized in CMOS circuitry is considered to detect the liquid in a channel integrated on top of CMOS chip. A microfluidic packaging procedure is described using a robotic-based fabrication process and the preliminary experimental results are reported. Also, the capacitive simulation results are displayed using finite-element based software.

Published in:

Computer Architecture for Machine Perception and Sensing, 2006. CAMP 2006. International Workshop on

Date of Conference:

18-20 Aug. 2006