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Ge Photodetectors Integrated with Waveguides for Electronic-Photonic Integrated Circuits on CMOS Platform

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8 Author(s)
Donghwan Ahn ; Dept. of Mater. Sci. & Eng., Massachusetts Inst. of Technol., Cambridge, MA ; Ching-Yin Hong ; Jifeng Liu ; Beals, M.
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Ge p-i-n photodetectors monolithically integrated with silicon oxynitride and silicon nitride waveguides on Si CMOS platform are presented. The devices demonstrated high efficiency (~1.08 A/W) and high-speed (>14 Gbit/s) performances at low bias.

Published in:

Optical Fiber Communication and the National Fiber Optic Engineers Conference, 2007. OFC/NFOEC 2007. Conference on

Date of Conference:

25-29 March 2007