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AFM Imaging Method Based on the Analysis of Piezo-Scanner Dynamic Characteristic

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4 Author(s)

Atomic force microscopy is a powerful tool in the field of nanotechnology and nanomanipulation. By utilizing dynamics of the AFM piezo-scanner, this paper proposes an innovative imaging method to improve the imaging precision of AFM along the Z direction. Specifically, this article first introduces the common imaging method utilized among commercial AFMs, then an improved imaging method based on the piezo-scanner's dynamics is presented to remedy the fault of imprecise imaging along Z direction during high-speed scan, and some theoretical analysis is implemented to verify the validity of the method. Finally some experimental results acquired from a real-time AFM control platform are included to demonstrate the superior performance of the proposed imaging method.

Published in:

Control Conference, 2007. CCC 2007. Chinese

Date of Conference:

July 26 2007-June 31 2007