Referenced Items are not available for this document.
Ion energy distribution functions (IEDFs) at the electrodes in single frequency (SF) and dual frequency (DF) radio-frequency discharges in Ar at pressures of 20 and 45 mtorr are measured and calculated. A numerical simulation of the IEDF on the base of a self-consistent particle-in-cell model with Monte Carlo collisions was performed. In addition, a semianalytical model was developed to calculate the IEDF in collisionless and collisional SF and DF plasmas. The IEDF width for the intermediate frequency case was determined from both experimental and theoretical results. The possibility of frequency decoupling is discussed.
Published in:
Plasma Science, IEEE Transactions on
(Volume:35
,
Issue:
5
)
Date of Publication: Oct. 2007
- Page(s):
- 1229 - 1240
- ISSN :
- 0093-3813
- INSPEC Accession Number:
- 9630126
- Digital Object Identifier :
- 10.1109/TPS.2007.905201
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 08 October 2007
- Issue Date :
- Oct. 2007
- Sponsored by :
- IEEE Nuclear and Plasma Sciences Society
About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies
A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2013 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.
