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Self-Consistent Modeling of the Effect of Wall-Neutral Reactions on Parallel Plate Radio Frequency Discharge Plasma in Pure Hydrogen

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4 Author(s)

A hybrid model (charged particles/neutral fluid) is used in studying the effect of wall-neutral reactions on the charged particle kinetics of parallel plate radio frequency discharge plasmas in pure hydrogen. These effects are due to the strong sensitivity of the H- production rate to the vibrational distribution function of H2 molecules. In particular, the effects of heterogeneous H recombination, vibrational deactivation, and recombination to vibrationally excited molecules are studied. Depending on the assumptions on such reactions, the simulated H2 plasma can behave like an electropositive or an electronegative one, and space distribution of charged particles is consistently affected.

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Plasma Science, IEEE Transactions on  (Volume:35 ,  Issue: 5 )