Cart (Loading....) | Create Account
Close category search window
 

Self-Consistent Modeling of the Effect of Wall-Neutral Reactions on Parallel Plate Radio Frequency Discharge Plasma in Pure Hydrogen

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)

A hybrid model (charged particles/neutral fluid) is used in studying the effect of wall-neutral reactions on the charged particle kinetics of parallel plate radio frequency discharge plasmas in pure hydrogen. These effects are due to the strong sensitivity of the H- production rate to the vibrational distribution function of H2 molecules. In particular, the effects of heterogeneous H recombination, vibrational deactivation, and recombination to vibrationally excited molecules are studied. Depending on the assumptions on such reactions, the simulated H2 plasma can behave like an electropositive or an electronegative one, and space distribution of charged particles is consistently affected.

Published in:

Plasma Science, IEEE Transactions on  (Volume:35 ,  Issue: 5 )

Date of Publication:

Oct. 2007

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.