Cart (Loading....) | Create Account
Close category search window
 

Stochastic Modeling for Serial-Batching Workstations with Heterogeneous Machines

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Shengwei Ding ; University of California, Berkeley ; Shanthikumar, J.G. ; Akhavan-Tabatabaei, R.

The bottleneck workstation in semiconductor manufacturing is lithography. Lithography is a complex manufacturing system (CMS) and consists of multiple products, serial-batching operations, re-entrant process flows, and parallel non-identical machines. Existing stochastic models for such a CMS focus on simple extensions of the classical queueing theory. These models fail to question the applicability of the theory but try to modify model inputs on the first moment (average) and the second moment (variation). The implementation of these models has been unsatisfactory. In this paper, we provide a stochastic model of such a CMS. We model the arrival process of CMS by Poisson Process and the service process by Markov Decision Process. We propose a geometric-distribution based probabilistic dispatching model. The model is verified using a lithography workstation in a high-volume wafer fabrication facility. This study provides a theoretic framework and promis-ing results for serial-batching operation modeling in semicon-ductor manufacturing and other industries as well.

Published in:

Automation Science and Engineering, 2007. CASE 2007. IEEE International Conference on

Date of Conference:

22-25 Sept. 2007

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.