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This paper presents an in-depth analysis of digital performance of a Multi-Gate FET technology. Ring oscillators with metal gates and undopedfins show an inverter delay of 13.9ps at 1V, the highest performance of a Multi-Gate FET technology reported at 1.9nA off-current/stage. NAND and NOR show significant improvement in delay vs. stack height compared to bulk CMOS. SRAM cells and product-typical critical paths with more than 10k transistors demonstrate the capability for large-scale integration.