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Fabrication of a Wideband Antenna on a Low-Resistivity Silicon Substrate Using a Novel Micromachining Technique

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2 Author(s)

Fabrication of a wideband antenna on a low-resistivity silicon substrate using a novel micromachining technique is described. The wideband antenna is based on a differential-fed dipole based design that is fabricated on a modified silicon substrate and this eliminates problems associated with antenna efficiency and strength. Results from our fabricated antenna reveal that it resonates at around 5.8 GHz and has a bandwidth of more than 43% making it potentially suitable for IEEE 802.11a and ultrawideband (UWB) applications. The size of the antenna is 12 mm times 2.8 mm times 0.4 mm. Furthermore, the fabricated antenna exhibits an efficiency of more than 20% and has a gain of - 1.35 dBi, which is good for a compact antenna fabricated on a low resistivity silicon substrate.

Published in:

Antennas and Wireless Propagation Letters, IEEE  (Volume:6 )