By Topic

Some Recent Topics of Non-equilibrium Discharge Plasma Technologies - Their Widespread Use from Low Pressure to Atmospheric Pressure

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

1 Author(s)
Toshiki Nakano ; Nat. Defense Acad., Yokosuka

Non-equilibrium discharge plasmas have been utilized in a variety of fields and are indispensable to material processing, nanotechnologies and biotechnologies besides conventional applications such as light sources. In this review, neutral beam etching, advanced oxidation, protein removal, combustion control and volume, non-equilibrium discharge generation at atmospheric pressure are chosen and summarized as the recent, typical applications of the non-equilibrium discharge plasmas generated from low pressure to atmospheric pressure. A brief introduction of non-equilibrium discharge plasmas is also given, which serves comprehensive understanding of the physics and chemistry behind the technology.

Published in:

IEEE Transactions on Dielectrics and Electrical Insulation  (Volume:14 ,  Issue: 5 )