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Continuous Inkjet Drop Generators Fabricated From Plastic Substrates

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1 Author(s)
Kathleen M. Vaeth ; Eastman Kodak Co., Rochester

Fabrication of a functional continuous inkjet drop generator from plastic substrates by exclusively using micro- electromechanical systems (MEMS) processing steps is reported. Polyimide and poly(ethylene naphthalate) sheets that are laminated to a silicon carrier wafer are investigated as the drop generator substrate, and the MEMS processing methods used and associated challenges are discussed in detail. Successful generation of drops in a 600-nozzles-per-inch array that are as small as 2.4 pL in volume (16.5 mum in diameter) at drop velocities of 15.5 m/s is realized with these devices.

Published in:

Journal of Microelectromechanical Systems  (Volume:16 ,  Issue: 5 )