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An emittance scanner has been developed for use with low-energy H- ion beams to satisfy the following requirements: (1) angular resolution of Â± 1/2 mrad, (2) small errors from beam space charge, and (3) compact and simple design. The scanner consists of a 10-cm-long analyzer containing two slits and a pair of electric deflection plates driven by a Â±500-V linear ramp generator. As the analyzer is mechanically driven across the beam, the front slit passes a thin ribbon of beam through the plates. The ion transit time is short compared with the ramp speed; therefore, the initial angle of the ions that pass through the rear slit is proportional to the instantaneous ramp voltage. The current through the rear slit then is proportional to the phase-space density d2i/dxdx. The data are computer-analyzed to give, for example, rms emittance and phase-space density contours. Comparison of measured data with those calculated from a prepared (collimated) phase space is in good agreement.