Scheduled System Maintenance:
Some services will be unavailable Sunday, March 29th through Monday, March 30th. We apologize for the inconvenience.
By Topic

Scheduling semiconductor wafer production: an expert system implementation

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Savell, D.V. ; Harris Semicond. Corp., Melbourne, FL, USA ; Perez, R.A. ; Koh, S.W.

A flexible environment for the production of semiconductor wafers is described. This facility currently manufactures over 300 wafer products. Each product follows a different route through a series of discrete processing operations, more than 150 of which take place in the facility. An expert system approach to scheduling, which efficiently utilizes the processing equipment within each cell while meeting overall due dates of all wafer lots, is detailed. The results obtained with the expert system and its applicability are evaluated.<>

Published in:

IEEE Expert  (Volume:4 ,  Issue: 3 )