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Growth of Quartz Thin Films by Catalyst-Enhanced Vapour-Phase Epitaxy under Atmospheric Pressure

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1 Author(s)
Nakamura, T. ; Shizuoka Univ., Hamamatsu

Preparation of quartz films by means of catalyst-enhanced chemical vapour deposition utilizing the reaction between Si(OC2H5)4 and O2 in the presence of gaseous HCl is summarized.

Published in:

Frequency Control Symposium, 2007 Joint with the 21st European Frequency and Time Forum. IEEE International

Date of Conference:

May 29 2007-June 1 2007