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On the Decomposition of Silane in Plasma Deposition Reactors

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3 Author(s)

In a low-pressure discharge, plasma-enhanced decomposition of silane proceeds by various channels including electron-impact, ion- and radical-induced, and heterogeneous reactions. The results of several experiments are presented to clarify the relative importance of the processes. The conclusions of these studies and associated analysis are that the dominant processes are strongly influenced by the gas residence time, the power density input, and the electronegative characteristics of the silane discharge.

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Plasma Science, IEEE Transactions on  (Volume:14 ,  Issue: 2 )