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DC Breakdown of C3F8/Ar and C3F8/N2 Mixtures

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3 Author(s)

Paschen curves are presented for C3F8/Ar and C3F8/N2 mixtures in the range of 500 torr · cm ¿ pds ¿ 1000 torr · cm. The dielectric strength and dynamic characteristics of these mixtures make them suitable candidates for diffuse discharge switches.

Published in:

Plasma Science, IEEE Transactions on  (Volume:12 ,  Issue: 3 )

Date of Publication:

Sept. 1984

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