By Topic

The Window Thickness of Diffused Junction Detectors

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Williams, R.L. ; RCA Victor Research Laboratories Montreal, Canada ; Webb, P.P.

The detector window thicknesses for carrier gas diffusions have been found to be very close to 1/2 the diffusion depths. This result is interpreted in terms of the concentration profile of the diffusant. In the surface region, where the impurity concentration is greater than 1018 per c.c., the carrier lifetime becomes so small that ionized charges recombine before they can diffuse to the junction. With reduced surface concentrations, window thicknesses of less than 1/2 the diffusion depth have been fabricated, but good voltage rating diodes with a window thickness of less than 0.1 micron (.025 mg/cm2) are yet to be realized. For all diffusion depths a non-noise resolution limit of devices has been observed which corresponds to approximately 1/3 the energy loss of an incident particle in the window layer of diodes. For paint-on diffusion detectors, the nominal 900°C - 10 minutes - 0.1 microns diffusion units have measured window thicknesses of about 0.3 microns. For the process studied it appears that an excessive amount of phosphorus is incorporated into the surface layer.

Published in:

Nuclear Science, IRE Transactions on  (Volume:9 ,  Issue: 3 )