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Cryogenic Microwave Cavity for Semiconductor Diagnostics

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2 Author(s)

A replaceable wall microwave cavity for semiconductor diagnostics is described for operation at cryogenic temperatures. A method of temperature compensation of resonant frequency is developed to minimize the frequency deviation due to thermal contraction of the cavity body. The anomalous skin effect at low temperatures is observed and taken into consideration.

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Instrumentation and Measurement, IEEE Transactions on  (Volume:18 ,  Issue: 3 )