By Topic

Design, Control and Application of a PZT-driven Micro-stage

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Zugen Yan ; Harbin Univ. of Commerce, Harbin ; Lining Sun

A precision positioning micro-stage driven by the piezoelectric actuator (PZT) is designed in this paper. The mathematic model of the micro-stage is modeled. Based on the theoretical calculation and the finite element analysis by ANSYS, the micro-stage is designed, which has the advantages of high precision, fast frequency response and high structural compaction. In order to overcome the inherent hysteresis and creep of PZT, a fuzzy PI controller is established. At last, experiments are carried out. Experimental results show that the micro-stage system has good performance. Compared with regular PID controller, the fuzzy PI controller has better time and frequency tracking characteristics, and higher positioning accuracy. Applied the micro-stage to compensate the yaw error of the macro-stage, the linear motion accuracy of the macro-stage improved greatly.

Published in:

Mechatronics and Automation, 2007. ICMA 2007. International Conference on

Date of Conference:

5-8 Aug. 2007