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Effect of Ar / O2 gas flow ratio on photocatalytic efficiency of TiO2 films prepared by DC magnetron sputtering

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3 Author(s)
Zhao Lin ; Lanzhou Jiaotong Univ., Lanzhou ; Liping Lv ; Qiu, Jiawen

Nanometer polycrystalline anatase TiO2 films were prepared by DC magnetron sputtering after annealing. Photocatalytic experiment reveals that the sample deposited under lower Ar/O2 gas flow ratio shows better degradation activity.

Published in:
Nano-Optoelectronics Workshop, 2007. i-NOW '07. International

Date of Conference: July 29 2007-Aug. 11 2007

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