Nanometer polycrystalline anatase TiO2 films were prepared by DC magnetron sputtering after annealing. Photocatalytic experiment reveals that the sample deposited under lower Ar/O2 gas flow ratio shows better degradation activity.
Published in:
Nano-Optoelectronics Workshop, 2007. i-NOW '07. International
Date of Conference: July 29 2007-Aug. 11 2007