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Integrated Nickel Micro-Nano-Hall Sensors on SU-8 Cantilevers for Scanning Hall Probe Microscopy

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7 Author(s)
S. Mouaziz ; Microsystems Laboratory, Ecole Polytechnique Fédérale de Lausanne (EPFL), CH-1015 Station 17 Lausanne Switzerland. E-mail: ; C. Imboden ; C. Santschi ; O. Vazquez Mena
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We report the fabrication and characterization of nickel Hall sensors integrated on SU-8 cantilevers. Sensors having active area down to 1 x 1 mum 2 show a magnetic field resolution better than 1 /n muT / Hz 1/2 in the thermal noise frequency range. The fabricated devices have been tested for magnetic imaging using the scanning Hall probe microscopy technique.

Published in:

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

Date of Conference:

10-14 June 2007