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Integrated Nickel Micro-Nano-Hall Sensors on SU-8 Cantilevers for Scanning Hall Probe Microscopy

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7 Author(s)
Mouaziz, S. ; Ecole Polytech. Federate de Lausanne (EPFL), Lausanne ; Imboden, C. ; Santschi, C. ; Mena, O.V.
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We report the fabrication and characterization of nickel Hall sensors integrated on SU-8 cantilevers. Sensors having active area down to 1 x 1 mum 2 show a magnetic field resolution better than 1 /n muT / Hz 1/2 in the thermal noise frequency range. The fabricated devices have been tested for magnetic imaging using the scanning Hall probe microscopy technique.

Published in:

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Date of Conference:

10-14 June 2007