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Optical Characterization of Repositionable Liquid Micro-Lenses

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5 Author(s)
Wolfgang Monch ; Department of Microsystems Engineering - IMTEK, University of Freiburg, Freiburg, GERMANY. Tel: +49 761 203 7573; E-mail: ; Riyaz P. Shaik ; Leif Lasinger ; Florian Krogmann
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A reconfigurable micro-lens array based on a transparent substrate and liquid micro-lenses actuated by electro-wetting on dielectrics (EWOD) is presented. The substrate features an array of electrodes and a surface structure with a periodicity smaller than that of the electrode array. The device is shown to be capable of individually adjusting the position and the focal length of liquid micro-lenses. Measurements of the focal length as a function of applied voltage are presented. The tunable micro-lens array may have applications for adaptive wavefront sensing, for parallelized confocal microscopy, and for parallel optical tweezers.

Published in:

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

Date of Conference:

10-14 June 2007