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Chiral Discrimination Performance of a Monolithic CMOS Gas Sensor Microsystem

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2 Author(s)
P. Kurzawski ; Physical Electronics Laboratory, ETH Zurich, Zurich, Switzerland. Tel: +41-44-633-2274; E-mail: pkurz@phys.ethz.ch ; A. Hierlemann

The performance of a single-chip, three-transducer CMOS gas sensor microsystem for the discrimination of chiral molecules is demonstrated. For the discrimination of enantiomers, such as methyl lactate and methyl 2-chloropropionate, an enantioselective coating based on a modified gamma-cyclodextrin dissolved in a polysiloxane matrix was used. The entire system comprising micromechanical components, i.e., a mass-sensitive, calorimetric, and capacitive transducer, and all the required circuitry components as well as interface and communication units are integrated on a single chip. The three different transducers inherently provide complementary information on the target analyte such as its volatility, polarity, and sorption heat.

Published in:

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

Date of Conference:

10-14 June 2007