Referenced Items are not available for this document.
We present for microfluidics the strongest yet mechanical micropump in sub-cm3 size, using simple processes and materials such as Parylene coated stainless steel stencils, paraffin, and copper clad polyimide. The pump consists of two active valves and one pumping chamber, each operated by a paraffin actuator. Each actuator is driven by a square pulse waveform with an amplitude of 1.8 V. The pump sequence has a period time of 14.4 s, resulting in the pumping of water up to 50 bar (5 MPa) back pressure without leakage and a flow rate of 0.75 muL/min.
Published in:
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Date of Conference: 10-14 June 2007
- Page(s):
- 2429 - 2432
- E-ISBN :
- 1-4244-0842-3
- Print ISBN:
- 1-4244-0842-3
- INSPEC Accession Number:
- 9828987
- Conference Location :
- Lyon
- Digital Object Identifier :
- 10.1109/SENSOR.2007.4300661
About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies
A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2013 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.
