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Thermal Characterization of Porous Silicon Micro-Hotplates using IR Thermography

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7 Author(s)

In this work we used combined IR measurements with a thermocamera as well as electrical measurements in vacuum, in order to accurately estimate the temperature that develops on porous silicon micro-hotplates of various designs. An overall emissivity value epsiv=0.25 has been used, obtained from the simulation of the electrical data for various micro hotplate designs. The estimated temperature is in good agreement with the simulated results.

Published in:

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Date of Conference:

10-14 June 2007

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