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The paper presents a technology platform for micromanipulation systems based on the piezoelectric cantilevers integrated with PZT thin-film micro force sensors and actuators. Two novel piezoelectric microcantilevers with two-segment and bimorph sol-gel PZT films were designed, fabricated by bulk micromachining and tested. The sensing and actuation capability of two-segment PZT microcantilevers as microforce sensors or actuators was characterized. The sensing performance of bimorph PZT microcantilevers was compared with the conventional unimorph microcantilever. The piezoelectric constant d31 of PZT films were measured without poling process.
Date of Conference: 10-14 June 2007