NiFe Plated Biaxial Magnetostatic MEMS Scanner

A two axis Microelectromechanical System (MEMS) micromirror actuator is developed for display and imaging applications. The device operates on the principle of generated magnetostatic torque by a flux generating high-frequency electro coil and a magnetic layer deposited on the movable part. The device can supply full optical scan angles of 88° (at 100 mA drive current) and 1.8° for slow and fast scan directions, respectively. Using a mirror size of 1.5 mm,
θ_opt·D
products of 132 °·mm and 2.7 °·mm for slow and fast axis are achieved, respectively. The scanner can be operated in air due to high mechanical quality factors of the order of 3000.