By Topic

NiFe Plated Biaxial Magnetostatic MEMS Scanner

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Yalcinkaya, A.D. ; Bogazici Univ., Istanbul ; Urey, H. ; Holmstrom, S.

A two axis microelectromechanical system (MEMS) micromirror actuator is developed for display and imaging applications. The device operates on the principle of generated magnetostatic torque by a flux generating high-frequency electro coil and a magnetic layer deposited on the movable part. The device can supply full optical scan angles of 88deg (at 100 mA drive current) and 1.8deg for slow and fast scan directions, respectively. Using a mirror size of 1.5 mm, thetasoptldrD products of 132 deg-mm and 2.7 deg-mm for slow and fast axis are achieved, respectively. The scanner can be operated in air due to high mechanical quality factors of the order of 3000.

Published in:

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Date of Conference:

10-14 June 2007