Simultaneous Dielectrophoretic Separation and Impedimetric Detection of Microbeads using Interdigitated Electrodes Array

This paper presents a polymer microfluidic biochip integrated with interdigitated electrodes arrays (IDAs), which is used for simultaneous separation, accumulation, and detection of microbeads using dielectrophoresis (DEP) and electrical impedance spectroscopy (EIS) methods. The DEP response of silica microspheres has been characterized, and microspheres with different sizes (1.8 μm and 3.5 μm) have been successfully separated and individually trapped in different microchambers with IDAs. Simultaneously, the impedance variation caused by captured microspheres at IDAs has been analyzed.