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Work Place Monitoring using a High Sensitive Surface Acoustic Wave Based Sensor System

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5 Author(s)
Barie, N. ; Inst. for Micro Struct. Technol., Karlsruhe ; Skrypnik, A. ; Voigt, A. ; Rapp, M.
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Based on a self developed surface acoustic wave (SAW) based sensor system we present two interesting new approaches to use such gas systems for work place monitoring. As main component they contain a miniaturized SAW micro sensor array with a dramatic reduced sampling volume and inner surface area. This concept is kept very flexible to serve as a platform for a large variety of gas analytical tasks. Using a combination of different pre-concentrators, filters and gas fluidic networks for sampling the systems can be easily adapted towards very different tasks like the online monitoring of refrigerants at their hazardous levels of a few ppm's or the detection of benzene at very low concentration levels even in the ppb range.

Published in:

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Date of Conference:

10-14 June 2007

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