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In this paper, a novel radio frequency (RF) induced power supply system for micro sensor nodes is presented. Supplied power in RF-electromagnetic wave is received and rectified in each micro sensor device. A charge pump (CP) circuit boosts up an output voltage of the received power, and stores the energy in a large capacitor. When the boost up voltage of CP circuit reaches to an arbitrary voltage, a switch circuit turns on and supplies regulated DC voltage to loads through a voltage regulator. In the integrated power supply system, large value capacitances of surface mount device (SMD) are required to be integrated. Deep holes are fabricated by deep reactive ion etching (DRIE) for SMD mounting. It was confirmed that this system supplies well regulated 4.0 V/lmADC power to the load for 10 msec periodically.