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An MSI Micromechanical Differential Disk-Array Filter

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4 Author(s)
Sheng-Shian Li ; Univ. of Michigan, Ann Arbor ; Yu-Wei Lin ; Zeying Ren ; Nguyen, C.T.-C.

A medium-scale integrated (MSI) vibrating micromechanical filter circuit that utilizes 128 radial-mode disk and mechanical link elements to achieve low motional resistance while suppressing unwanted modes and feedthrough signals has been demonstrated with a 0.06%-bandwidth insertion loss less than 2.5 dB at 163 MHz. The ability to attain an insertion loss this small for such a tiny percent bandwidth on chip is unprecedented and is made possible here by the availability of Q's >10,000 provided by capacitively transduced resonators. In particular, the MSI mechanical circuit is able to harness the high Q of capacitively transduced resonators while overcoming their impedance deficiencies via strategic mechanical circuit design methodologies, such as the novel use of wavelength-optimized resonator coupling to effect a differential mode of operation that substantially improves the stopband rejection of the filter response while also suppressing unwanted modes.

Published in:

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Date of Conference:

10-14 June 2007